The present invention aims at providing a lighting apparatus which is to be installed in a color camera, which is capable of providing the stable quantity of light from a light source such as an LED, and which is capable of stabilizing color tones of an image captured with the color camera. In order to attain this object, in the lighting apparatus according to the present invention, the temperature control for the camera is also simultaneously carried out using a thermal transfer member for enhancing heat transfer between a Peltier element used for the temperature control for an LED case with built-in LEDs, and the LED case.


> Substrate processing apparatus and substrate processing method

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